Passivation of hybrid-orientation direct
โ
Magnus C. Wagener; Mike Seacrist; George A. Rozgonyi
๐
Article
๐
2007
๐
Elsevier Science
๐
English
โ 279 KB
This paper reports on the effect hydrogenation has on the electrical properties of hybrid-orientation (1 1 0)/(1 0 0) direct silicon bonded interfaces. Temperature-dependent capacitance measurements and deep-level transient spectroscopy were used to evaluate the distribution of interface states foll