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[Japan Soc. Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (11-13 July 2000)] Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) - Hierarchical optical proximity correction on contact hole layers

✍ Scribed by Yamamoto, K.; Kobayashi, S.; Uno, T.; Kotani, T.; Tanaka, S.; Inoue, S.; Watanabe, S.; Higurashi, H.

Book ID: 126614387
Publisher: Japan Soc. Appl. Phys
Year: 2000
Weight: 123 KB
Category: Article
ISBN-13: 9784891140045
DOI: 10.1109/IMNC.2000.872612

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