✦ LIBER ✦

Isotropic Etching of SiC

✍ Scribed by Stauden, Thomas; Niebelschütz, Florentina; Tonisch, Katja; Cimalla, Volker; Ecke, Gernot; Haupt, Christian; Pezoldt, Jörg

Book ID: 121327969
Publisher: Trans Tech Publications, Ltd.
Year: 2008
Tongue: English
Weight: 580 KB
Volume: 600-603
Category: Article
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/MSF.600-603.651

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Nearly isotropic etching of 6H-SiC in NF

Nearly isotropic etching of 6H-SiC in NF3 and O2 using a remote plasma

✍ Luther, B. P.; Ruzyllo, J.; Miller, D. L. 📂 Article 📅 1993 🏛 American Institute of Physics 🌐 English ⚖ 703 KB

Defect-selective etching of SiC

✍ Weyher, J. L. ;Lazar, S. ;Borysiuk, J. ;Pernot, J. 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 272 KB

## Abstract Two methods of defect‐selective etching of SiC are described: (i) orthodox etching in molten KOH–NaOH eutectic with 10% of MgO powder (E + M etch) and (ii) electroless photo‐etching in aqueous KOH solutions (PEC method). The first etch shows similar effectiveness in revealing different

Anisotropic Etching of SiC Whiskers

✍ Cambaz, Goknur Z.; Yushin, Gleb N.; Gogotsi, Yury; Lutsenko, Vadim G. 📂 Article 📅 2006 🏛 American Chemical Society 🌐 English ⚖ 415 KB

Isotropic Plasma Etching of SiO2 Films

✍ A. A. Kovalevskii; V. S. Malyshev; V. V. Tsybul'skii; V. M. Sorokin 📂 Article 📅 2002 🏛 Springer 🌐 English ⚖ 89 KB

Synchrotron-radiation-excited etching of

Synchrotron-radiation-excited etching of SiC

✍ Masayoshi Ogura; Shingo Terakado; Shigeo Suzuki; Kenichiro Tanaka 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 479 KB

Deep SiC etching with RIE

✍ M. Lazar; H. Vang; P. Brosselard; C. Raynaud; P. Cremillieu; J.-L. Leclercq; A. 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 320 KB