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Irradiation effects of gas-cluster CO2 ion beams on Si

✍ Scribed by I. Yamada; G.H. Takaoka; M.I. Current; Y. Yamashita; M. Ishii

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Study of Si wafer surfaces irradiated by

✍ H. Isogai; E. Toyoda; T. Senda; K. Izunome; K. Kashima; N. Toyoda; I. Yamada 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 408 KB

Effects of Ga ion-beam irradiation on mo

✍ Wang, Quan; Mao, Wei; Ge, Daohan; Zhang, Yanmin; Shao, Ying; Ren, Naifei 📂 Article 📅 2013 🏛 American Institute of Physics 🌐 English ⚖ 944 KB

Sputtering effect of gas cluster ion bea

✍ T. Yamaguchi; J. Matsuo; M. Akizuki; C.E. Ascheron; G.H. Takaoka; I. Yamada 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 323 KB

Effect of oblique irradiation of gas clu

✍ A. Suzuki; E. Bourelle; A. Sato; T. Seki; J. Matsuo 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 303 KB

Irradiation effects of water cluster ion

✍ Ryuto, Hiromichi; Ichihashi, Gaku; Takeuchi, Mitsuaki; Takaoka, Gikan H. 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 354 KB

Reduction of irradiation damage using si

✍ Noriaki Toyoda; Isao Yamada 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 810 KB