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Irradiation effects of 6 MeV electron on electrical properties of Al/Al2O3/n-Si MOS capacitors

✍ Scribed by P. Laha; I. Banerjee; A. Bajaj; P. Chakraborty; P.K. Barhai; S.S. Dahiwale; A.K. Das; V.N. Bhoraskar; D. Kim; S.K. Mahapatra

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Irradiation effects of 6&#xa0;MeV electron on electrical properties of Al/Al2O3/n-Si MOS capacitors