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IR spectroscopic ellipsometry: instrumentation and applications in semiconductors

✍ Scribed by Gilbert Zalczer; Olivier Thomas; Jean-Philippe Piel; Jean-Louis Stehlé

Book ID: 103429160
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 418 KB
Volume: 234
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90285-w

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