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Ir photoelasticity study of stress distribution in silicon under thin film structures

✍ Scribed by S.P. Wong; W.Y. Cheung; N. Ke; M.R. Sajan; W.S. Guo; L. Huang; Shounan Zhao


Book ID
114194299
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
530 KB
Volume
51
Category
Article
ISSN
0254-0584

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