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Ion migration effects in r.f. “sputter cleaning” of dielectric films

✍ Scribed by Daniel V. McCaughan; R.A. Kushner

Publisher: Elsevier Science
Year: 1974
Tongue: English
Weight: 261 KB
Volume: 22
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(74)90306-x

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