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The effects of oxygen concentration in sputter-deposited molybdenum films

✍ Scribed by T.T. Bardin; J.G. Pronkoz; R.C. Budhani; J.S. Lin; R.F. Bunshah

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 228 KB
Volume: 165
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(88)90695-5

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