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Dielectric properties of r.f. sputtered thin aluminium fluoride films

✍ Scribed by A.M. Phahle; A.E. Hill; M. Ruzinsky; J.H. Calderwood

Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 353 KB
Volume: 38
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(76)90281-9

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