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Ion induced X-ray emission and electron microscopy for the investigation of micro-particles

✍ Scribed by C.M. Romo-Kröger


Book ID
113285929
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
494 KB
Volume
85
Category
Article
ISSN
0168-583X

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Investigation of an Mo/SiO2 interface by
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We have studied the solid/solid interface between Mo and SiO 2 films deposited, respectively, by magnetron d.c. sputtering and plasma-enhanced chemical vapour deposition (PECVD). The sample depth profile was characterized by SIMS. We used electron-induced x-ray emission spectroscopy to characterize