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Ion-induced tracks in amorphous Si3N4 films

✍ Scribed by B. Canut; A. Ayari; K. Kaja; A.-L. Deman; M. Lemiti; A. Fave; A. Souifi; S. Ramos

Book ID: 108224261
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 568 KB
Volume: 266
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2008.03.125

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