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Radiation effects of vacuum ultraviolet lasers in amorphous Si3N4 films

โœ Scribed by Kazuo Nakamae; Kou Kurosawa; Masato Ohmukai; Masahito Katto; Masahiro Okuda; Wataru Sasaki; Shigenori Nozawa; Tatsushi Igarashi


Book ID
113286217
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
423 KB
Volume
91
Category
Article
ISSN
0168-583X

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