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Ion-induced interface layer formation in W/Si and WRe/Si multilayers

✍ Scribed by M.J.H. Kessels; J. Verhoeven; F.D. Tichelaar; F. Bijkerk


Book ID
108279092
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
334 KB
Volume
582
Category
Article
ISSN
0039-6028

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