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Ion-implanted treatment of (Ba,Sr)TiO3 films for DRAM applications

โœ Scribed by R.H. Horng; D.S. Wuu; C.Y. Kung; J.C. Lin; C.C. Leu; T.Y. Haung; S.M. Sze


Book ID
117144719
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
120 KB
Volume
280
Category
Article
ISSN
0022-3093

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