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Ion implantation of silicon carbide

✍ Scribed by A Hallén; M.S Janson; A.Yu Kuznetsov; D Åberg; M.K Linnarsson; B.G Svensson; P.O Persson; F.H.C Carlsson; L Storasta; J.P Bergman; S.G Sridhara; Y Zhang

Book ID: 114165166
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 201 KB
Volume: 186
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)00880-1

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