Ion implantation into non-planar targets: Monto Carlo simulations and analytical models

✍ Scribed by Heiner Ryssel; Jürgen Lorenz; Wolfgang Krüger

• Book ID: 114168049
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 281 KB
• Volume: 19-20
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(87)80012-5