✦ LIBER ✦
A transport equation model that is consistent with Monte Carlo simulations of ion implantation into infinite targets
✍ Scribed by Oven, R; Bowyer, M D J; Ashworth, D G
- Book ID
- 126491441
- Publisher
- Institute of Physics
- Year
- 1993
- Tongue
- English
- Weight
- 555 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0953-8984
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