✦ LIBER ✦

Ion energy and angular distributions in inductively coupled radio frequency discharges in argon

✍ Scribed by Woodworth, Joseph R.; Riley, Merle E.; Meister, Dorothy C.; Aragon, Ben P.; Le, Minh S.; Sawin, Herbert H.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactor geometry and plasma uniformity i

✍ Stittsworth, J A; Wendt, A E 📂 Article 📅 1996 🏛 Institute of Physics 🌐 English ⚖ 173 KB

Structured ion energy distribution in ra

✍ Wild, Ch.; Koidl, P. 📂 Article 📅 1989 🏛 American Institute of Physics 🌐 English ⚖ 548 KB

Lecture notes on radio-frequency dischar

✍ Goedheer, W J 📂 Article 📅 2000 🏛 Institute of Physics 🌐 English ⚖ 206 KB

Molecular Emission Spectra in the Radio-

✍ Reeves, R. D.; Nikdel, S.; Winefordner, J. D. 📂 Article 📅 1980 🏛 Society for Applied Spectroscopy 🌐 English ⚖ 534 KB

Electron energy distributions and anomal

✍ Vasenkov, Alex V.; Kushner, Mark J. 📂 Article 📅 2002 🏛 The American Physical Society 🌐 English ⚖ 380 KB

Separate control of the ion flux and ion

✍ Lafleur, T.; Delattre, P. A.; Johnson, E. V.; Booth, J. P. 📂 Article 📅 2012 🏛 American Institute of Physics 🌐 English ⚖ 565 KB