✦ LIBER ✦

Ion energy analysis for sputtering-type electron-cyclotron-resonance microwave plasma

✍ Scribed by Matsuoka, Morito; Ono, Ken'ichi

Book ID: 120628431
Publisher: American Institute of Physics
Year: 1988
Tongue: English
Weight: 669 KB
Volume: 64
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.342534

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