✦ LIBER ✦
A new sputtering-type electron cyclotron resonance microwave plasma using an electric mirror and high-rate deposition
✍ Scribed by Matsuoka, Morito; Ono, Kenâichi
- Book ID
- 120628432
- Publisher
- American Institute of Physics
- Year
- 1989
- Tongue
- English
- Weight
- 994 KB
- Volume
- 65
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.343279
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