✦ LIBER ✦

Electron cyclotron resonance microwave ion sources for thin film processing

✍ Scribed by L.A. Berry; S.M. Gorbatkin

Book ID: 113281439
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 610 KB
Volume: 56-57
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)95114-s

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