✦ LIBER ✦
Design and performance of a versatile, cost-effective microwave electron cyclotron resonance plasma source for surface and thin film processing
✍ Scribed by Anton, R.; Wiegner, Th.; Naumann, W.; Liebmann, M.; Klein, Chr.; Bradley, Chr.
- Book ID
- 120251534
- Publisher
- American Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 471 KB
- Volume
- 71
- Category
- Article
- ISSN
- 0034-6748
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