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Ion dynamics of rf plasmas and plasma sheaths: A time-resolved spectroscopic study

✍ Scribed by Gottscho, Richard A.; Burton, Randolph H.; Flamm, Daniel L.; Donnelly, Vincent M.; Davis, Glenn P.

Book ID
121831376
Publisher
American Institute of Physics
Year
1984
Tongue
English
Weight
734 KB
Volume
55
Category
Article
ISSN
0021-8979

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