✦ LIBER ✦

Ion drag effects in inductively coupled plasmas for etching

✍ Scribed by Collison, Wenli Z.; Kushner, Mark J.

Book ID: 120446354
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 390 KB
Volume: 68
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.116225

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Kinetics of etching in inductively coupl

Kinetics of etching in inductively coupled plasmas

✍ Min Tae Kim 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 240 KB

Negative ion density in inductively coup

Negative ion density in inductively coupled chlorine plasmas

✍ G. A. Hebner 📂 Article 📅 1996 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 268 KB

Metastable chlorine ion kinetics in indu

Metastable chlorine ion kinetics in inductively coupled plasmas

✍ G. A. Hebner 📂 Article 📅 1997 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 394 KB

Selective dry etching of InGaP over GaAs

Selective dry etching of InGaP over GaAs in inductively coupled plasmas

✍ P. Leerungnawarat; H. Cho; D. C. Hays; J. W. Lee; M. W. Devre; B. H. Reelfs; D. 📂 Article 📅 2000 🏛 Springer US 🌐 English ⚖ 222 KB

Reactive ion etching of FePt using induc

Reactive ion etching of FePt using inductively coupled plasma

✍ Tomomi Kanazawa; Kohei Ono; Masato Takenaka; Masashi Yamazaki; Kenichi Masuda; S 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 608 KB

u À 2u scan for the as-deposited FePt film. The diffraction peaks associated with the formation of L1 0 ordered structure were clearly observed . Furthermore, the magnetic property of the film was investigated employing a superconducting quantum interference device (SQUID) magnetometer with the magn

Induced magnetic-field effects in induct

Induced magnetic-field effects in inductively coupled plasmas

✍ Cohen, Ronald H.; Rognlien, Thomas D. 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 353 KB