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Ion beam modification of glass surface properties

✍ Scribed by P. Mazzoldi


Book ID
115987304
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
762 KB
Volume
120
Category
Article
ISSN
0022-3093

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Ion beam modiÐcation of InSe (single crystals and molecular beam epitaxy-grown thin Ðlms on Si(111) substrate) by Ar' and O' (3 keV beam energy) is studied by XPS. The Ar' ion bombardment produces surface layer enrichment in metallic indium with a gradient of concentrations, i.e. the top surface lay