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Pulsed ion beams for modification of metal surface properties

✍ Scribed by V.Yu. Fominskii; A.M. Markeev; V.N. Nevolin

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
179 KB
Volume
42
Category
Article
ISSN
0042-207X

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Ion Beam Modification of InSe Surfaces
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Ion beam modiÐcation of InSe (single crystals and molecular beam epitaxy-grown thin Ðlms on Si(111) substrate) by Ar' and O' (3 keV beam energy) is studied by XPS. The Ar' ion bombardment produces surface layer enrichment in metallic indium with a gradient of concentrations, i.e. the top surface lay