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Ion-beam irradiation effects on reactively sputtered CrN thin films

✍ Scribed by M. Novaković; M. Popović; N. Bibić

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
684 KB
Volume
268
Category
Article
ISSN
0168-583X

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Carbon nanotube (CNT) dispersed polyimide films were prepared using an ultrasonic homogenizer and a spin coater. Ion irradiation followed by thermal annealing was performed in order to enhance the conductivity of the films. The samples were irradiated at room temperature with 20 keV nitrogen ions at