AuSi compound formation induced by ion
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O. Puglisi; A. Licciardello; L. Calcagno; G. Foti
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Article
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1984
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Elsevier Science
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English
⚖ 418 KB
Ion bombardment with energetic ions of a thin layer of Au deposited on a silicon substrate gives rise to efficient intermixing-This Au-52 intermixed layer has been analyzed with Rutherford back++cattexing specrrometry and X-ray photoelectron sp&roscopy. The results of these investigations show that