AuSi compound formation induced by ion mixing

✍ Scribed by O. Puglisi; A. Licciardello; L. Calcagno; G. Foti

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 418 KB
• Volume: 112
• Category: Article
• ISSN: 0009-2614
• DOI: 10.1016/0009-2614(84)87044-x

✦ Synopsis

Ion bombardment with energetic ions of a thin layer of Au deposited on a silicon substrate gives rise to efficient intermixing-This Au-52 intermixed layer has been analyzed with Rutherford back++cattexing specrrometry and X-ray photoelectron sp&roscopy. The results of these investigations show that Au-Si compound formation occurs and that this can provide the driving force for the observed intermixing.