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Ion-beam-induced insulator deposition for chip circuit modification

✍ Scribed by Loren Hahn; Marsha Abramo; Leon Moszkowicz; Andrew Doyle; Diane Stewart

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 387 KB
Volume: 270
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)06844-9

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