✦ LIBER ✦
Ion beam techniques combining insulator deposition and hydrogen plasma etching for III–V compound metal/insulator/semiconductor device applications
✍ Scribed by C. Sibran; R. Blanchet; M. Garrigues; P. Viktorovitch
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 514 KB
- Volume
- 103
- Category
- Article
- ISSN
- 0040-6090
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