✦ LIBER ✦

Ion beam induced enhancement of noble metal film adhesion on sapphire

✍ Scribed by K. R. Padmanabhan; J. Chevallier; G. Sørensen

Publisher: Springer
Year: 1986
Tongue: English
Weight: 284 KB
Volume: 5
Category: Article
ISSN: 0261-8028
DOI: 10.1007/bf01731542

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion-beam-enhanced adhesion of iron films

Ion-beam-enhanced adhesion of iron films to sapphire substrates

✍ J.E. Pawel; C.J. McHargue; L.J. Romana; J.J. Wert 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 436 KB

Enhancement of copper adhesion on alumin

Enhancement of copper adhesion on alumina induced by ion-beam mixing

✍ G. Fuchs; E. Abonneau; M. Treilleux; A. Perez 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 252 KB

The enhanced adhesion properties of meta

The enhanced adhesion properties of metallic thin films on metal substrates by ion implantation

✍ Zuwu Lai; Renhe Liu; Jiming Wang; Baifu Xie 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 300 KB

Ion-beam induced annealing of radiation

Ion-beam induced annealing of radiation damage in silicon on sapphire

✍ B. Svensson; J. Linnros; G. Holmén 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 373 KB

Ion beam modification of MoSx films on m

Ion beam modification of MoSx films on metals

✍ N.J. Mikkelsen; G. Sørensen 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 456 KB

Enhancing adhesion by ion beam-induced a

Enhancing adhesion by ion beam-induced atomic mixing at the interface between copper film and polyimide substrate

✍ S. K. Koh; K. D. Pae; N. G. Stoffel; D. L. Hart 📂 Article 📅 1990 🏛 Society for Plastic Engineers 🌐 English ⚖ 462 KB

## Abstract Ion beam mixing was used to improve the adhesion between deposited Cu film (400 Å) and polyimide (PI) substrate. Ar^+^ ion with the energy levels between 180 and 200 keV, and the dose between 10^14^ to 4 × 10^16^ ions/cm^2^ were used. The surface analyses were carried out by Rutherford