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Ion beam induced chemistry: the case of ozone synthesis and its influence on the sputtering of solid oxygen

✍ Scribed by M Famá; D.A Bahr; B.D Teolis; R.A Baragiola

Book ID
114166013
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
128 KB
Volume
193
Category
Article
ISSN
0168-583X

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✍ Eun-Hee Cirlin; Yang-Tse Cheng; Philip Ireland; Bruce Clemens 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB

## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf