Ion beam sputter deposited W/Si multilayers: Influence of re-sputtering on the interface structure and structure modification at ultra short periods

✍ Scribed by S.K. Rai; Arijeet Das; A.K. Srivastava; G.S. Lodha; Rajnish Dhawan

• Book ID: 116244572
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 482 KB
• Volume: 257
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2011.07.083