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Ion beam implantation by expanding instead of scanning

✍ Scribed by J. Schelten; T. Fuhrmann; A. van der Hart; U. Kurz

Book ID: 113282137
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 568 KB
Volume: 62
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)95911-v

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