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Ion beam exposure of PMMA polymer resist

✍ Scribed by R Mühle; G Götz

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Electron-beam exposure characteristics o

✍ M.D.R. Thomas; D.G. Hasko; H. Ahmed; D.B. Brown; B.F.G. Johnson 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 309 KB

Ion beam exposure of resists

✍ H. Ryssel; G. Prinke; H. Bernt; K. Haberger; K. Hoffmann 📂 Article 📅 1982 🏛 Springer 🌐 English ⚖ 232 KB

Modified PMMA-Polymers for Masks in Ion

✍ Kisza, M. ;Oleszkiewicz, E. 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 193 KB

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✍ T.B. Borzenko; Y.I. Koval; V.A. Kudryashov 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 359 KB

Ion beam assisted unzipping of PMMA

✍ M.E Fragalà; G Compagnini; L Torrisi; O Puglisi 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 130 KB

Computer modelling of resist exposure by

✍ I.M. Templeton; E.V. Kornelsen 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 472 KB