✦ LIBER ✦

Ion beam etching mechanism of PMMA based resists by noble gas ions

✍ Scribed by T.B. Borzenko; Y.I. Koval; V.A. Kudryashov

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 359 KB
Volume: 23
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)90168-6

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Recovery of fused silica surface damage

Recovery of fused silica surface damage resistance by ion beam etching

✍ Shizhen Xu; Wanguo Zheng; Xiaodong Yuan; Haibin Lv; Xiaotao Zu 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 453 KB

Nanofabrication of GaInAsP/InP 2-dimensi

Nanofabrication of GaInAsP/InP 2-dimensional photonic crystals by a methane-based reactive ion beam etching

✍ Toshihiko Baba; Naohisa Kamizawa; Mitsutaka Ikeda 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 466 KB

As a 2-dimensional photonic crystal, columns periodically arranged with nanometer order pitches have been formed on GalnAsP/InP wafer, aiming at the effective control of spontaneous emission without discrimination of nonradiative process. For the fine and low damage etching of columns, a reactive io

Enhancement of the corrosion resistance

Enhancement of the corrosion resistance of a Ti-based alloy by ion beam deposition methods

✍ F. Noli; P. Misaelides; J.P. Riviere 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 524 KB

Noble-gas-like mechanism of localized fi

Noble-gas-like mechanism of localized field ionization of nitrogen as detected by field ion appearance energy spectroscopy

✍ Yu. Suchorski; V.K. Medvedev; J.H. Block 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 506 KB

4959. Investigation of plasma etching me

4959. Investigation of plasma etching mechanisms using beams of reactive gas ions: T M Mayer et al, J Vac Sci Technol, 18 (2), 1981, 349–352

📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 166 KB

494. Superconductivity of transition met

494. Superconductivity of transition metal thin films deposited by noble gas ion beam sputtering: P H Schmidt, J Vac Sci Technol, 10 (5), 1973, 611–615.

📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 165 KB