✦ LIBER ✦
4959. Investigation of plasma etching mechanisms using beams of reactive gas ions: T M Mayer et al, J Vac Sci Technol, 18 (2), 1981, 349–352
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 166 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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