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Ion-beam deposition of metal films : A. R. Wolter, Proc. IEEE Symposium on “Molecular Concepts in Microelectronics”, St. Louis, May 24, 25, 26 (1965), p. 2A-1

Book ID: 113190386
Publisher: Elsevier Science
Year: 1966
Tongue: English
Weight: 99 KB
Volume: 5
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(66)90142-9

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