442. Ion-beam deposition of metal films: A R Wolter, Molecular Concepts in Microelectronics, 4th Proc of Microelectronics Symp, St Louis, Miss, May 1965, Inst Elec and Electronic Eng 2A-1 to 2A-8, 1965

• Book ID: 107868783
• Publisher: Elsevier Science
• Year: 1966
• Tongue: English
• Weight: 143 KB
• Volume: 16
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(66)93717-1