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Investigations on the behaviour of C60as a resist in X-ray lithography

✍ Scribed by H. Klesper; R. Baumann; J. Bargon; J. Hormes; H. Zumaqué-Díaz; G.A. Kohring


Book ID
106019760
Publisher
Springer
Year
2005
Tongue
English
Weight
630 KB
Volume
80
Category
Article
ISSN
1432-0630

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