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Investigations on possibilities of inline inspection of high aspect ratio microstructures

✍ Scribed by Rainer Engelke; Gisela Ahrens; Norbert Arndt-Staufenbiehl; Stefan Kopetz; Karin Wiesauer; Bernd Löchel; Henning Schröder; Johann Kastner; Andreas Neyer; David Stifter; Gabi Grützner

Publisher: Springer-Verlag
Year: 2006
Tongue: English
Weight: 397 KB
Volume: 13
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-006-0170-7

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