✦ LIBER ✦
Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique
✍ Scribed by Rainer Engelke; Josef Mathuni; Gisela Ahrens; Gabi Gruetzner; Martin Bednarzik; Daniel Schondelmaier; Bernd Loechel
- Publisher
- Springer-Verlag
- Year
- 2008
- Tongue
- English
- Weight
- 377 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0946-7076
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