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Investigation on stress evolution in boron nitride films

✍ Scribed by C Fitz; W Fukarek; A Kolitsch; W Möller

Book ID: 108422712
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 255 KB
Volume: 128-129
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(00)00579-x

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