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Investigation on crystalline structure, boron distribution, and residual stresses in freestanding boron-doped CVD diamond films

✍ Scribed by Hongdong Li; Tong Zhang; Liuan Li; Xianyi Lü; Bo Li; Zengsun Jin; Guangtian Zou


Book ID
108166071
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
515 KB
Volume
312
Category
Article
ISSN
0022-0248

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X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD 18 21 diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10 -10 3 boron / cm . The grain size, obtained from SEM images, showed gr