Residual stresses and crystalline qualit
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N.G Ferreira; E Abramof; E.J Corat; V.J Trava-Airoldi
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Article
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2003
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Elsevier Science
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English
⚖ 124 KB
X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD 18 21 diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10 -10 3 boron / cm . The grain size, obtained from SEM images, showed gr