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Investigation of ultrathin DLC film growth by a novel X-ray reflectivity technique and in situ ellipsometry

✍ Scribed by Kondrashov, P.E.; Smirnov, I.S.; Lukashov, Y.E.; Yablokov, S.Yu.; Baranov, A.M.; Dowling, D.P.; Donnelly, K.; Flood, R.V.; McConnell, M.L.

Book ID: 123345417
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 171 KB
Volume: 8
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(98)00405-1

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