## Abstract Inβsitu temperature measurement is essential in CVD in order to control the temperature of the growing films. This is frequently achieved by optical pyrometry because it is a sensitive, convenient, and inexpensive technique that can be used in corrosive atmospheres. In this work, inβsit
X-ray Monitoring System for in situ Investigation of Thin Film Growth
β Scribed by Dr. I. F. Mikhailov; V. I. Pinegin; V. V. Sleptzov; A. M. Baranov
- Publisher
- John Wiley and Sons
- Year
- 1995
- Tongue
- English
- Weight
- 343 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0232-1300
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The X-ray investigations of solid phases in the multicomponent systems KCl-KBr-H20, K,S04-(NH4),S04-H,0 and KN03-NH,N03-H,0 were conducted and the crystal lattice parameters of mixed crystals forming in these systems were determined. It was confirmed that in the KCI-KBr-H,O system the continuous sol