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Investigation of thermal annealing of optical properties and residual stress of ion-beam-assisted TiO_2 thin films with different substrate temperatures

✍ Scribed by Lee, Cheng-Chung ;Chen, Hsi-Chao ;Jaing, Cheng-Chung

Book ID: 115352788
Publisher: The Optical Society
Year: 2006
Tongue: English
Weight: 170 KB
Volume: 45
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.45.003091

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