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Annealing dependence of residual stress and optical properties of TiO_2 thin film deposited by different deposition methods

โœ Scribed by Chen, Hsi-Chao ;Lee, Kuan-Shiang ;Lee, Cheng-Chung


Book ID
115354003
Publisher
The Optical Society
Year
2008
Tongue
English
Weight
689 KB
Volume
47
Category
Article
ISSN
1559-128X

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